Introduction SAWATEC Product range:
Modular machine concept to meet specific needs
SAWATEC offers a comprehensive service package, which can be adapted to your needs. The wide range of application-oriented instruments, systems and components is used for various processing steps along the entire process chain, offering versatile customer benefit:
- Wafer Clean & Primer: Spin Rinser Dryer, Hotplates
- Photoresist & Soft Bake:Spin Modules, Spray Coater, Hotplates
- Post Bake & Develop:Hotplates, Developers, Coolplates
- Stripping:Developer-Etch
- Clean & Inspection: Spin Rinser Dryer
