Sputter Power Supplies

e-Vap® CVS power supplies

e-Vap® CVS power supplies are the perfect solution for modern coating systems. The digital control system allows user control of power level and arc management. MeiVac offers 3 standard power configurations; 3kW, 6kW and 12kW. These can be programmed to match any electron beam source to perfection. Power supplies come with both Ethernet and a 50 pin digital I/O with access to all key control and monitoring features. A standard graphic user interface (GUI) is also included. All CVS supplies include our 1U filament drive unit, remote mount filament transformer and complete installation / cable kit. Multi-channel kits are also available to control up to 3 ebeam sources per power supply.

e-Vap 3kW CVS Power Supplies

  • Fast-arc recovery system
  • Ethernet and RS-232 communications

Advanced graphical user interface

e-Vap 6kW CVS Power Supplies

  • Fast-arc recovery system
  • Ethernet and RS-232 communications

Advanced graphical user interface

e-Vap 12kW CVS Power Supplies

  • Fast-arc recovery system
  • Ethernet and RS-232 communications

Advanced graphical user interface

DC & RF Power Supplies for MAK Sputter Sources

e-Vap® CVS power supplies are the perfect solution for modern coating systems. The digital control system allows user control of power level and arc management. MeiVac offers 3 standard power configurations; 3kW, 6kW and 12kW. These can be programmed to match any electron beam source to perfection. Power supplies come with both Ethernet and a 50 pin digital I/O with access to all key control and monitoring features. A standard graphic user interface (GUI) is also included. All CVS supplies include our 1U filament drive unit, remote mount filament transformer and complete installation / cable kit. Multi-channel kits are also available to control up to 3 ebeam sources per power supply.

MAXIM 500W DC Power Supply

  • Superior arc suppression circuitry
  • Universal input voltage
  • Regulation in power, voltage, or current modes

MAXIM 1000W DC Power Supply

  • Superior arc suppression circuitry
  • Universal input voltage
  • Regulation in power, voltage, or current modes

MAXIM 1500W DC Power Supply

  • Superior arc suppression circuitry
  • Universal input voltage
  • Regulation in power, voltage, or current modes

R301 13.56MHz 300W RF Power Supplies

  • Air Cooled 
  • RS-232 / 422 / 485
  • CE Marked
  • Master / Slave Operation

R601 13.56MHz 600W RF Power Supplies

  • Air Cooled
  • RS-232 / 422 / 485
  • CE Marked
  • Master / Slave Operation
Trade in Old Pump: Upgrade & Save Up to $800! ✨
Email our staff at sales@ezzivacuum.com.au
Ensure your current vacuum pump is an Edwards RV3 or a similar model. Offer valid on new Edwards RV3 pumps only.
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