Sawatec Components

OPTIMUM SPIN CHUCK FOR PERFECT COATING RESULTS

SAWATEC’s Spin Chuck range provides a wide selection of options suitable for various substrate sizes and materials. This range enables smooth transitions between different Spin Chuck sizes and designs, ensuring optimal performance. Selecting the appropriate spin chuck size and specific design is essential to prevent contamination of the reverse side of the substrate.

The process of replacing spin chucks is simple and tool-free, allowing for convenient and efficient changes. Depending on the specific application requirements, SAWATEC offers both one-piece and two-piece spin chucks, available in vacuum or mechanical variants. Some spin chucks also feature an optical centering aid, further enhancing precision and alignment during the coating process.

TWO-PIECE SPIN CHUCK

SAWATEC has introduced an innovative two-piece Spin Chuck that brings significant advantages. This new design offers cost savings by enabling the handling of multiple substrate dimensions. The chuck holder, made from Aluminum, can be paired with a variety of plastic Spin Chucks. This versatility allows for efficient storage of a full set of different chuck sizes, making it particularly beneficial in work environments with limited space, such as Gloveboxes and other Cabinet applications. With the two-piece Spin Chuck, SAWATEC provides a solution that combines convenience, flexibility, and space optimization for enhanced productivity.

SM-150/HP-150

Spin chuck set

SAWATEC has developed a convenient Spin Chuck Set that includes various sizes of Spin Chucks based on commonly used dimensions. The chuck holder is seamlessly integrated into the Spin Module SM-150, ensuring compatibility and easy installation. Although the Spin Chuck Set is primarily designed for the SM-150, it can also be utilized for larger instruments, providing flexibility in different coating applications. Additionally, the previous versions of Spin Coaters, namely the SM-180 and SM-180 easy, can utilize this new Spin Chuck Set by adding the required chuck holder to the standard set. This comprehensive solution enables smooth transitions and improved versatility for spin coating processes across different SAWATEC equipment.

  • Universal Spin Chuck Set that fits interchangeable chuck sizes
  • Reduced cost for the capability of handling multiple substrate dimensions
  • Faster switching between substrates of different sizes
  • No tools required for installation
  • Compatible with all SAWATEC Spin Modules
  • Clean room applicable metal storage case for chuck sizes not in use

The set includes starting from specimen 8, 1″, 2″, 4″ and 6″ vacuum chucks.

For more details or the documentation please contact our Sales Team via contact form

The SAWATEC Spin Modules are the optimal choice for manual or semi-automatic coating of thin layers. The cleanliness of the process chamber is very important to achieve good coating results. It is therefore advisable to clean the spin coater immediately after each use (cleaning instructions in accordance with the operating instructions). There are some places, which are often too little considered or need a little more cleaning effort. In order to keep the cleaning effort for the process chamber to a minimum, SAWATEC has developed a good value bowl protection insert. This bowl protection insert is easy to remove and dispose of once the process has been completed.

  • Cost-effective and process-optimised solution
  • Perfect shape accurate fit in the process bowl
  • Significantly less contamination of the process chamber
  • Considerably shorter cleaning time
  • Simple replacement of the used bowl protection insert (disposable item)

Precision Dosing Pumps

SAWATEC offers a range of dosing pumps that excel in handling a wide range of media viscosities while delivering high-precision volume control. These pumps are constructed using durable and chemically inert materials, ensuring excellent compatibility with various fluids. Their compact and space-saving design allows for easy flushing and cleaning, resulting in a long lifespan and cost-effective maintenance. These pumps are not only utilized in SAWATEC instruments and systems but are also preferred by numerous OEM customers.

The versatility of the dosing pumps makes them suitable for a broad range of applications. They are particularly well-suited for use in the semiconductor industry, MEMS applications, medical technology, the chemical/pharmaceutical industry, bottling plants, and analytical and laboratory equipment. With their reliable performance and wide applicability, SAWATEC dosing pumps provide efficient and precise fluid delivery for diverse industries.

SP-177

SPV-15

FP-20

GSP-98-ML

GSP-98

Diaphragm dosing pumps SP-177

The diaphragm dosing pumps SP-177 and SPV-15, as well as the diaphragm supply pump FP-20 are perfectly suited for applications with highly fluid and viscous media and are also approved for explosion-proof processes. All three types have a robust design, are low-maintenance and very reliable. Thanks to these properties, they are a good choice for flexible applications.

  • Dosing amount: 0.1 … 12 ml (± 0.1 ml, timer dependent)
  • Viscosity: 10 … 800 cps
  • Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
  • Maximum flow of the medium: 4 ml/sec (depending on tube length and viscosity)
  • Pump controller
    • Vacuum: -0.4 …-0.8 bar
    • Compressed air: 0.5 … 5 bar

For more details or the documentation please contact our Sales Team via contact form

Diaphragm dosing pumps SPV-15

The diaphragm dosing pumps SP-177 and SPV-15, as well as the diaphragm supply pump FP-20 are perfectly suited for applications with highly fluid and viscous media and are also approved for explosion-proof processes. All three types have a robust design, are low-maintenance and very reliable. Thanks to these properties, they are a good choice for flexible applications.

  • Dosing amount: 0.1 … 12 ml (± 0.1 ml, timer dependent)
  • Viscosity: 10 … 800 cps
  • Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
  • Maximum flow of the medium: 4 ml/sec (depending on tube length and viscosity)
  • Pump controller
    • Vacuum: -0.4 …-0.8 bar
    • Compressed air: 0.5 … 5 bar

For more details or the documentation please contact our Sales Team via contact form

Diaphragm supply pump FP-20

The diaphragm dosing pumps SP-177 and SPV-15, as well as the diaphragm supply pump FP-20 are perfectly suited for applications with highly fluid and viscous media and are also approved for explosion-proof processes. All three types have a robust design, are low-maintenance and very reliable. Thanks to these properties, they are a good choice for flexible applications.

  • Dosing amount: 0,1 … 20 ml (± 0,1 ml, timer dependent)
  • Viscosity: 10 … 800 cps
  • Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
  • Maximum flow of the medium: 20 ml/sec  (depending on tube length and viscosity)
  • Pump controller
    • Vacuum: -0,4 … -0,8 bar
    • Compressed air: 0,5 … 5 bar
  •  

For more details or the documentation please contact our Sales Team via contact form

Diaphragm supply pump FP-20

The precision pumps GSP-98-ML and GSP-98 are ideal for applications requiring high-precision dosing amounts. Due to their innovative design with integrated valve control, these pumps do not require any additional external valves. The medium is not stressed because it does not control the pump. Therefore, no gas bubbles form.

PUMP CONTROLLER GSP II

  • Features: Dosing, flushing, cleaning
  • 10 freely definable dosing and cleaning programmes
  • User interface via membrane keys with two-line display
  • Process parameters: Dosing, reverse, offset and suck back time
  • Controller controls the stepper motor and the magnetic valve
  • Sensor checks the initial position of the needle valve
  • Equipped with RS232 and digital I/O interface
  • Easy system integration
  • Dosing amount: 0,01 … 2 ml (± 0.004 ml)
  • Viscosity: 10 … 500 cps
  • Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
  • Maximum flow of the medium: 2 ml/sec (depending on tube length and viscosity)
  • Stepper motor torque: 0.6 Nm
  • Pump controller: Vacuum 4 bar (+ 0.5 bar)
  •  

For more details or the documentation please contact our Sales Team via contact form

The precision pumps GSP-98-ML and GSP-98 are ideal for applications requiring high-precision dosing amounts. Due to their innovative design with integrated valve control, these pumps do not require any additional external valves. The medium is not stressed because it does not control the pump. Therefore, no gas bubbles form.

  • Dosing amount: 0,02 … 5 ml (± 0.01 ml)
  • Viscosity: 10 … 3’000 cps
  • Medium pressure created by the pump: < 0.2 bar (depending on tube length and viscosity)
  • Maximum flow of the medium: 4 ml/sec (depending on tube length and viscosity)
  • Stepper motor torque: 0.6 Nm
  • Pump controller: Vacuum 4 bar (+ 0.5 bar)

For more details or the documentation please contact our Sales Team via contact form

The diaphragm dosing valve DV-257rounder among the diaphragm dosing valves. It is perfectly suited for any type of media with low to medium viscosity and explosion-proof processes.

In addition, SAWATEC‘s product range includes further application-based valves.

A wide viscosity range, coupled with space-saving designs, a long life cycle thanks to hard-wearing materials, very easy cleaning and inexpensive maintenance distinguish all SAWATEC dosing valves.