Electron Beam Gun & Power Supply


The HPS series are power supply for electron beam-evaporation that supply electricity of 5/10/16kW at the maximum, and aim at more stable evaporation. By adopting a solid-state style,we could realize downsizing,lightweighting and high reliability.


  • These are no water concerns due to forced air-cooling in use.
  • No regular separate parts like vaccum tube.
  • Fixed current drop method is used to minimize film depositionrate reductions during abnormal discharges(arcing).
  • It is possible to stably control electricity due to the feedback control of emission.
  • Each circuit has been refined and improvements have been made for higher reliability and operational stability.


  • Vaccum evaporation
  • Ion plating
Rotary Vane Pumps and Dry Scroll Pumps
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