Electron Beam Gun & Power Supply


The HPS series are power supply for electron beam-evaporation that supply electricity of 5/10/16kW at the maximum, and aim at more stable evaporation. By adopting a solid-state style,we could realize downsizing,lightweighting and high reliability.


  • These are no water concerns due to forced air-cooling in use.
  • No regular separate parts like vaccum tube.
  • Fixed current drop method is used to minimize film depositionrate reductions during abnormal discharges(arcing).
  • It is possible to stably control electricity due to the feedback control of emission.
  • Each circuit has been refined and improvements have been made for higher reliability and operational stability.


  • Vaccum evaporation
  • Ion plating
Trade in Old Pump: Upgrade & Save Up to $800! ✨
Email our staff at sales@ezzivacuum.com.au
Ensure your current vacuum pump is an Edwards RV3 or a similar model. It must qualify for the trade-in.
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