E-Beam Gun Sources And Spares
e-Vap® E-beam Evaporation Sources
e-Vap 3kW Miniature Source
- Compact design
- Water cooled
- 2cc fixed pocket
Fits onto a 2.75″ CF flange
e-Vap 3kW Mighty Source
- Compact design
- Uniquely small footprint
- 2cc x 4-pocket configuration
Water cooled
e-Vap 10kW Large Fixed Pocket Source
- Modular design
- Water Cooled
7 to 100cc Fixed pocket
e-Vap 10kW Large Rotary Pocket Source
- Modular design
- Water cooled
- 7 to 30cc x 4-pocket configuration
- 7 to 12cc x 6-pocket configuration
150cc carousel pocket
e-Vap XL Rotary Pocket Source
- Water cooled
- 100cc x 3 pocket configuration
- 40 to 75cc x 4 pocket configuration
- 25 to 40cc x 6 pocket configuration
400cc carousel pocket
e-Vap Custom Flangemount Assemblies
- Custom specified flange sizes
- Vertical & horizontal configurations
- Integrated electrical, water, and motion feedthroughs
Shutter options available
UHV Linear Source
- 7 to 40cc x 4 pocket
- No in vacuum bearings
Bakeable to 220 C
Electron Beam Gun & Power Supply
Electron Beam Gun & Power Supply
