UHV Linear e-Vap® Sources

 

    

e-Vap UHV linear pocket electron beam sources are the perfect choice for UHV coating tools. This source is extremely rugged with no in-vacuum bearings or sliding surfaces to bind or create particulates. Designed to withstand repeated high temperature bakeouts and extended periods under vacuum, this source offers a whole new level of reliability. Our proven advanced magnetic and high frequency sweep systems provide the best material utilization and stability in both rate and uniformity. Coupled with our extreme life filament system, the e-Vap UHV linear is the smart choice for MBE type applications.