E-Beam Gun Sources And Spares

e-Vap® E-beam Evaporation Sources


e-Vap 3kW Miniature Source

  • Compact design
  • Water cooled
  • 2cc fixed pocket

Fits onto a 2.75″ CF flange

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e-Vap 3kW Mighty Source

  • Compact design
  • Uniquely small footprint
  •  2cc x 4-pocket configuration

Water cooled

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e-Vap 10kW Large Fixed Pocket Source

  • Modular design
  • Water Cooled

7 to 100cc Fixed pocket

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e-Vap 10kW Large Rotary Pocket Source

  • Modular design
  • Water cooled
  • 7 to 30cc x 4-pocket configuration
  • 7 to 12cc x 6-pocket configuration

150cc carousel pocket

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e-Vap XL Rotary Pocket Source

  • Water cooled
  • 100cc x 3 pocket configuration
  • 40 to 75cc x 4 pocket configuration
  • 25 to 40cc x 6 pocket configuration

400cc carousel pocket

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e-Vap Custom Flangemount Assemblies

  • Custom specified flange sizes
  • Vertical & horizontal configurations
  • Integrated electrical, water, and motion feedthroughs

Shutter options available

 

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UHV Linear Source

  • 7 to 40cc x 4 pocket
  • No in vacuum bearings

Bakeable to 220 C

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Electron Beam Gun & Power Supply

 

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Electron Beam Gun & Power Supply

 

 

 

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